|
KMID : 1011420040090010161
|
|
Journal of Korean Ophthalmic Optics Society
2004 Volume.9 No. 1 p.161 ~ p.166
|
|
|
Characteristics of TiN Films by ion Beam Assisted Deposition
|
|
Kim Sang-Hyun
Kim Dae-Hyeon
|
|
|
Abstract
|
|
|
|
|
|
|
KEYWORD
|
|
|
lon assisted beam, TiN, Thin film
|
|
|
FullTexts / Linksout information
|
|
|
|
|
|
Listed journal information
|
|
|